Collaborative development example: Exposure equipment interface

In cooperation with the equipment manufacturer, we will maximize the equipment performance by supplying data suitable for the equipment and directly controlling the equipment parameters.

■ Exposure equipment interface development

① Import design data (GDS/GBR/DXF) and conduct data appropriateness checks.
② While checking the data editing screen, specify the setting parameters and apply special correction.
③ Outputs a PMC file that matches the exposure device.

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